Fundamentals of Microfabrication and Nanotechnology

Fundamentals of Microfabrication and Nanotechnology

Book - 2012
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"Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"-- Provided by publisher.
Publisher: Boca Raton, FL : CRC Press/Taylor & Francis Group, c2012.
Edition: 3rd ed.
ISBN: 9780849331800
9781420055115
1420055119
9781420055191
1420055194
9781420055160
142005516X
Characteristics: 3 v. : ill. (some col.) ; 29 cm.

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